Wet Etching

Plain Wafer holders, holders with optical inspection and etching baths

Electrochemical
Etch-Stop

Wafer holders with electrical contacts and dadicated potentiostats

Electroplating

Wafer Holder with front-side contacts and Electroplating Systems

Porous Silicon
Etching

Complete wet etching system for porous silicon formation

Hydrofluoric acid
vapor etcher

Sticking free and dry silicon oxide removal

Customer specific
developements

A few examples for our engineering an development capabilities

 

Our primary focus is the development of reliable tools, smart instruments, and systems for silicon micromachining. To this end we take full advantage of our inside knowledge of the demands of MEMS engineers, and provide reliable all-in-one solutions for both research and industry.

AMMT's tools and systems are designed by MEMS engineers for MEMS engineers.

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