- Wet Etching Wafer holders for anisotropic single sided wet-etching.
- Electrochemical Etch-Stop Wafer holder with electrical backside-contacts, MEMS Potentiostat and control software.
- Electroplating Wafer holders with front side contacts.
- Porous Silicon A double-cell system for porous silicon etching – optical windows for illumination and a computer controlled constant current source.
- Hydrofluoric Acid Vapor Etcher Sticking free and dry silicon oxide removal.
- Customer Specific Developments A few examples of our engineering and development capabilities.
Our primary focus is the development of reliable tools, smart instruments, and systems for silicon micromachining. To this end we take full advantage of our inside knowledge of the demands of MEMS engineers, and provide reliable all-in-one solutions for both research and industry.
AMMT's tools and systems are designed by MEMS engineers for MEMS engineers.
AMMT is pleased to introduce the all-new Infrared spectroscopy etch-stop system.