Products : AMMT
Overview.
Wet etching techniques form the basis of most fabrication processes for MEMS devices. The wide variety of available etchants allows for tailoring of the process for selectivity, etch rate, surface roughness, etch-stop techniques and other parameters. AMMT offers highly reliable equipment for etching processes in the field of micro-fabrication. ... read more.

To protect the backside of the wafer during etching, AMMT offers both plain wafer holders and holders with electrical contacts for electrochemical etch-stop processes. Together with the MEMS Potentiostat series, AMMT offers turnkey etching systems for silicon micromachining.

For production environments, a complete solution for HF-etching of up to four glass wafers and substrates in parallel with etchant agitation is also available.

   For electroplating, AMMT has developed a series of special holders with dry electrical contacts on the front (plating) side. These holders are chemically compatible with all plating electrolytes and can be equipped with a customer-specific number of contact pins to assure a homogenous current density over the wafer.

AMMT is also the first commercial supplier of dedicated etching systems for porous silicon formation. An extremely reliable HF double tank bath, precise wafer holders and a flexible, programmable current source are the core elements of this elegant solution for porosification, scalable from research to production.
Product portfolio. AMMT's broad product portfolio services.
Full product portfolio. Shortcuts.

  • Wet Etching
  • Single series
    • A wafer holder for a single wafer with backside protection
  • Tandem series
    • Unique wafer holders for two wafers mounted face-to-face
  • Single OW
    • Unique wafer holders with a backside optical window
  • Single IL
    • Unique wafer holders with built-in backside illumination
  • Single Chip
    • Special custom-made holders for single chips
  • IRES : Infrared spectroscopy etch-stop
  • Single IRES
    • Wafer holder with built-in spectroscopy optics.
  • Single IRES system
    • Pending in review.
  • Electrochemical etch-stop
  • Wafer holder series
  • Single EC
    • Wafer holders for single wafers with electrical contacts for etch-stop
  • Electrode set
    • Complete set of platinum net and pseudo-reference electrodes for etch-stop
  • MEMS Potentiostat
  • Model SC
    • Compact potentiostat with special features for electrochemical etch-stop
  • Model MC
    • Multi-channel potentiostat for medium- to large scale manufacturing
  • Software
    • Software to control and monitor etch-stop processes using a PC


AMMT GmbH :Products
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