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Wafer holder series
- Single ECWafer holders for single wafers with electrical contacts for etch-stop.
- Electrode setComplete set of platinum net and pseudo-reference electrodes for etch-stop MEMS Potentiostat
- Model SCCompact potentiostat with special features for electrochemical etch-stop
- Model MCMulti-channel potentiostat for medium- to large scale manufacturing
- SoftwareSoftware to control and monitor etch-stop processes using a PC
Electrochemical Etch-Stop, MEMS Potentiostats : Model SC
A dedicated potentiostat for electrochemical etch-stop proceses.
A dedicated potentiostat for electrochemical etch-stop proceses.
The MEMS Potentiostat Model SC has been especially designed for the use with electrochemical etch-stop techniques in silicon micromachining. The fabrication of many microelecrtomechanical systems (MEMS) depends on a reliable and easy to use potential controller for this processing step.
The MEMS Potentiostat meets both needs. First, a high degree of integration and use of a powerful microcontroller are proof for the technical standard of this system. Very low noise op-amps, precision voltage references and high accuracy A/D- and D/A-converters guarantee excellent reproducibility of your etch-stop process. All outputs are short circuit protected and shut-down if overloaded. The unit detects common error conditions, as a broken wafer or cable, and alerts the operator providing an error description.
Second, the MEMS Potentiostat offers both manual and computer controlled operation. In manual mode, the user sets the bias voltage directly at the potentiostat. A y-t-plotter can be connected to the unit to plot the current over time for an end-point detection. In computer controlled mode a dedicated software for Microsoft Windows NT/2000/XP gives the user control over all potentiostat settings. In this case, the computer logs all data, presents them on screen and saves them to disk for later use.
Features
Second, the MEMS Potentiostat offers both manual and computer controlled operation. In manual mode, the user sets the bias voltage directly at the potentiostat. A y-t-plotter can be connected to the unit to plot the current over time for an end-point detection. In computer controlled mode a dedicated software for Microsoft Windows NT/2000/XP gives the user control over all potentiostat settings. In this case, the computer logs all data, presents them on screen and saves them to disk for later use.
Features
| » | Output volta ge from -10 V to 10 V |
| » | supplementary voltage output for four electrode configuration (voltage range 0 V to 10 V) |
| » | output current up to 250 mA |
| » | all outputs with short-circuit protection and thermal shut-down |
| » | auto-ranging current-to voltage converter |
| » | alphanumeric status display (current and voltage) |
| » | manual operation with current readout for y-t-plotters |
| » | computer control via serial port (RS-232 compatible) |
| » | dedicated software for Microsoft Windows NT/2000/XP |
| » | compact design |
| » | error detection (broken wafer, broken cable, current overload) |
| » | detection algorithm for current peak |
| » | fully opto-isolated computer-interface allows independent parallel processing in a single etchant bath |
Images. Click to enlarge.
For more information, please download our product info below.
For a complete list of our product information sheets please see our Documentation Download Section.
For a complete list of our product information sheets please see our Documentation Download Section.