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Wafer holder series
- Single ECWafer holders for single wafers with electrical contacts for etch-stop.
- Tandem ECUnique EC wafer holders for two wafers mounted face-to-face
- Electrode setComplete set of platinum net and pseudo-reference electrodes for etch-stop MEMS Potentiostat
- Model SCCompact potentiostat with special features for electrochemical etch-stop
- Model MCMulti-channel potentiostat for medium- to large scale manufacturing
- SoftwareSoftware to control and monitor etch-stop processes using a PC
Electrochemical Etch-Stop, Wafer holder series: Tandem EC
Wafer holder tandem EC series 4” and 6” with electrodes.
Wafer holder tandem EC series 4” and 6” with electrodes.
The Tandem wafer holders were used for more than 15 years in MEMS industry and research and have convinced over 100 users of their reliability and engineering quality. A unique feature of AMMT's Tandem holders is their symmetrical, small footprint construction that allows to mount two wafers facing each other into a single holder. As a consequence, even a small etchant bath can be used to etch a number of wafers simultaneously. If only one wafer needs to be processed, a Pyrex glass wafer can be mounted into the second slot as dummy cover. As an alternative, AMMT offers also a holder design for a single wafer, Single series.
The wafer is sealed by a double precision O-ring system that reduces mechanical stress on the wafer to a minimum. Two covers on the front and back side hold the wafers in place, fixed be six screws. As the customer-specific wafer thickness is machined as recess into the cover, all screws can be tightened using a regular wrench without sensitivity to the applied torque. This assures a minimum mechanical stress on the fragile wafer.
Tandem EC wafer holders are equipped with two gold-plated, spring-mounted electrical contacts for electrochemical etching of silicon that are placed according to user requirements. Additional contacts can be added upon request.
The wafer is sealed by a double precision O-ring system that reduces mechanical stress on the wafer to a minimum. Two covers on the front and back side hold the wafers in place, fixed be six screws. As the customer-specific wafer thickness is machined as recess into the cover, all screws can be tightened using a regular wrench without sensitivity to the applied torque. This assures a minimum mechanical stress on the fragile wafer.
Tandem EC wafer holders are equipped with two gold-plated, spring-mounted electrical contacts for electrochemical etching of silicon that are placed according to user requirements. Additional contacts can be added upon request.
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For more information, please download our product info below.
For a complete list of our product information sheets please see our Documentation Download Section.
For a complete list of our product information sheets please see our Documentation Download Section.