- Porous Silicon System MPSB Double cell HF tank for porous silicon etching with electoralytical backside contact
- Porous Silicon System PSB Single Cell Single cell HF-bath for porous silicon formation
- PS Power Supply and Control Software Flexible programmable power supply with control software for time-based current profiles
Porous silicon (PS) has gained wide-spread attention over the last decade for its interesting material properties, including nanometer features and extremely high specific surface area. Applications are, amongst others, humidity sensors, particle filters, optical elements and biochemical matrices. Microporous silicon is fabricated by etching silicon in HF-based solutions under applied voltage. Most fabrication processes for macroporous silicon need illumination in addition, an issue also addressed by AMMTs tools for PS formation.
AMMT’s line of PS equipment consists of:
| » | The PSB system, a double cell tank which holds the HF-based etchant and which is equipped with platinum electrodes |
| » | One or more wafer holders supporting the wafer, which are mounted into the PSB during etching |
| » | The Porous Silicon Power Supply PS², which provides the large electrical currents needed for PS formation |
Together, these products form a turn-key system for porous silicon etching, which is used by major players in the MEMS field.
For details on these wafer holders, please see the product pages.
Figure_ n+ -type porous silicon made by anodization at 250 mA/cmin the dark in an ethanoic?HF bath: (left) SEM porous silicon front view; (right) SEM porous silicon cross-section view.