- Single series Wafer holders for a single wafer with backside protection
- Tandem series Unique wafer holders for two wafers mounted face-to-face
- Single OW Wafer holder for single sided etching with an optical backside window
- Single IL Unique wafer holders with built-in backside illumination
- Single chipSpecial custom-made holders for single chips
Wet Etching: HF Etch Box
Solution for medium scale HF-etching for glass wafers.
Solution for medium scale HF-etching for glass wafers.
For the medium to large-scale production of glass and quartz wafers with etched features, AMMT has developed an etching system with etchant agitation. Agitation with a stirrer ensures optimal etch quality with regards to etch rate homogeneity and surface roughness.
As many as four wafers are mounted around the stirrer using AMMT's Single series of wafer holders. An HF vapor extraction is installed around the upper rim of the bath to avoid exposure to harmful vapors.
As many as four wafers are mounted around the stirrer using AMMT's Single series of wafer holders. An HF vapor extraction is installed around the upper rim of the bath to avoid exposure to harmful vapors.
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For more information, please download our product info below.
For a complete list of our product information sheets please see our Documentation Download Section.
For a complete list of our product information sheets please see our Documentation Download Section.