• Single series Wafer holders for a single wafer with backside protection
• Tandem series Unique wafer holders for two wafers mounted face-to-face
• Single OW Wafer holder for single sided etching with an optical backside window
• Single IL Unique wafer holders with built-in backside illumination
• Single chipSpecial custom-made holders for single chips

• HF Etch Box Solution for medium scale HF-etching for glass wafers

Especially for customers who subscribe to multi-user manufacturing processes, AMMT’s single chip holders are a valuable tool. These miniaturized holders support single chip wet chemical etching with backside protection. Minimum edge exclusion widths are assured by custom-made sealing rings, which are available in a variety of shapes and dimensions.

Material compatibility, temperature range and AMMT’s low-stress locking mechanism are the same as for our successful series of Single and Tandem wafer holders. Please inquire for a tool for your specific chip dimension.

For more information, please download our product info below.
For a complete list of our product information sheets please see our Documentation Download Section.