- Single series Wafer holders for a single wafer with backside protection
- Tandem series Unique wafer holders for two wafers mounted face-to-face
- Single OW Wafer holder for single sided etching with an optical backside window
- Single IL Unique wafer holders with built-in backside illumination
- Single chipSpecial custom-made holders for single chips
Wet Etching: Single IL
Wafer holder for single sided etching with internal illumination
Wafer holder for single sided etching with internal illumination
A unique feature of the Single-IL type is an integrated halogen lamp or LED array for optical inspection of the membrane thickness. Silicon membranes of about 22 µm and less are optically transmissive and appear in different shades of brown depending on their thickness. The backside illumination feature is a helpful tool to overcome some of the shortcomings of time based etch-stop techniques.
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For more information, please download our product info below.
For a complete list of our product information sheets please see our Documentation Download Section.
For a complete list of our product information sheets please see our Documentation Download Section.