- Wet Etching Wafer holders for anisotropic single sided wet-etching.
- Electrochemical Etch-Stop Wafer holder with electrical backside-contacts, MEMS Potentiostat and control software.
- Electroplating Wafer holders with front side contacts.
- Porous Silicon A double-cell system for porous silicon etching – optical windows for illumination and a computer controlled constant current source.
- Hydrofluoric Acid Vapor Etcher Sticking free and dry silicon oxide removal.
- Customer Specific Developments A few examples of our engineering and development capabilities.
Our primary focus is the development of reliable tools, smart instruments, and systems for silicon micromachining. To this end we take full advantage of our inside knowledge of the demands of MEMS engineers, and provide reliable all-in-one solutions for both research and industry.
AMMT's tools and systems are designed by MEMS engineers for MEMS engineers.
06.01.2010 Visit us at the 23rd International Conference on Micro Electro Mechanical Systems (MEMS 2010). January 24th till 28th, 2010 in Hong-Kong. 01.10.2009 Visit us at the Mikrosystemtechnik-Kongress.
October 12th till 14th, 2009 in Berlin. You will find us at Booth 6. 21.08.2009 AMMT released the Hydrofluoric acid vapor etcher (HFVE) system with automated HF handling for 6" wafers. Read more. 12.05.2009 New distribution agreements in China signed. 28.02.2009 New products series for solar cell wafer wet etching launched.
AMMT is pleased to introduce the all-new Infrared spectroscopy etch-stop system.
Training in Microsystems -
Porous Silicon in Microsystems
November 19, 2010
at Zurich, Switzerland, FSRM
with Dr. Gerhard Lammel
Porous Silicon in Microsystems
November 19, 2010
at Zurich, Switzerland, FSRM
with Dr. Gerhard Lammel